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kohler illumination meaning in Chinese

柯勒照明
科勒氏照明

Examples

  1. Kohler illumination was used in proximity lithography , and a fly ' s eye lens was adopted to form multi - point source in order to uniform the light intensity on the mask plane
    摘要接近式光刻中一般采用柯勒照明系统,并采用蝇眼透镜形成多点光源均匀掩模面的光场分布。

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